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Properties of GaP(001) surfaces treated in aqueous HF solutions
http://hdl.handle.net/10087/2943
http://hdl.handle.net/10087/294326c457f2-d22b-4d2c-a74d-5e9bbd010f34
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
JApplPhys_101_113518.pdf (194.0 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2008-02-29 | |||||
| タイトル | ||||||
| タイトル | Properties of GaP(001) surfaces treated in aqueous HF solutions | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
Morota, Hiroaki
× Morota, Hiroaki× Adachi, Sadao |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Chemically cleaned GaP(001) surfaces in aqueous HF solutions have been studied using\nspectroscopic ellipsometry (SE), ex situ atomic force microscopy (AFM), x-ray photoelectron\nspectroscopy (XPS), wettability, and photoluminescence (PL) measurements. The SE data clearly\nindicate that the solutions cause removal of the native oxide film immediately upon immersing the\nsample (?1 min). The SE data, however, suggest that the native oxide film cannot be completely\netch-removed. This is due to the fact that as soon as the etched sample is exposed to air, the oxide\nstarts to regrow. The SE estimated roughness is ～1 nm, while the AFM roughness value is\n～0.3 nm. The XPS spectra confirm the removal of the native oxide and also the presence of regrown\noxide on the HF-etched GaP surface. The wettability measurements indicate that the HF-cleaned\nsurface is hydrophobic, which is in direct contrast to those obtained from alkaline-cleaned surfaces\n(hydrophilic). A slight increase in the PL intensity is also observed after etching in aqueous HF solutions. | |||||
| 書誌情報 |
Journal of Applied Physics 巻 101, 号 11, p. 113518-1-113518-6, 発行日 2007-06-01 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0021-8979 | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | info:doi/10.1063/1.2737781 | |||||
| 権利 | ||||||
| 権利情報 | (C)2007 American Institute of Physics | |||||
| フォーマット | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | application/pdf | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
| 資源タイプ | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | Journal Article | |||||
| 異版である | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://jap.aip.org/ | |||||
| 更新日 | ||||||
| 日付 | 2017-03-27 | |||||
| 日付タイプ | Created | |||||
